发明授权
- 专利标题: Method and device for forming film
- 专利标题(中): 薄膜成膜方法及装置
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申请号: US10357526申请日: 2003-02-03
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公开(公告)号: US06780290B2公开(公告)日: 2004-08-24
- 发明人: Masahiro Ikadai , Etsuo Ogino
- 申请人: Masahiro Ikadai , Etsuo Ogino
- 优先权: JP2001-167648 20010604
- 主分类号: C23C1434
- IPC分类号: C23C1434
摘要:
The prevent invention improves the film thickness distribution in the direction of revolution of substrates by a simple manner in a method for forming coating films, wherein a evaporating source 3 is disposed at a predetermined distance from substrates 2, and when a coating film material is applied from the evaporating source 3 onto the substrate surfaces while revolving the substrates 2, coating films are formed on the substrate surfaces in a condition where the radius of curvature of the substrates 2 obtained by bending the substrates 2 within the elasticity range is made equal to the radius of revolution of the substrates 2.
公开/授权文献
- US20030132101A1 Method and device for forming film 公开/授权日:2003-07-17