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US06780786B2 Method for producing a porous silicon film 有权
多孔硅膜的制造方法

  • Patent Title: Method for producing a porous silicon film
  • Patent Title (中): 多孔硅膜的制造方法
  • Application No.: US09994280
    Application Date: 2001-11-26
  • Publication No.: US06780786B2
    Publication Date: 2004-08-24
  • Inventor: George M. Dougherty
  • Applicant: George M. Dougherty
  • Main IPC: H01L2131
  • IPC: H01L2131
Method for producing a porous silicon film
Abstract:
A membrane structure comprising a silicon film having a grain structure including grains defining pores therebetween.
Abstract(Chinese):

一种膜结构，其包括具有晶粒结构的硅膜，所述晶粒结构包括在其间限定孔的颗

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