发明授权
- 专利标题: Optical arrangement
- 专利标题(中): 光学布置
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申请号: US09752282申请日: 2000-12-29
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公开(公告)号: US06781668B2公开(公告)日: 2004-08-24
- 发明人: Karl-Heinz Schuster , Hubert Holderer , Rudolf Von Bünau , Christian Wagner , Jochen Becker , Stefan Xalter , Wolfgang Hummel
- 申请人: Karl-Heinz Schuster , Hubert Holderer , Rudolf Von Bünau , Christian Wagner , Jochen Becker , Stefan Xalter , Wolfgang Hummel
- 优先权: DE19963587 19991229
- 主分类号: G03B2752
- IPC分类号: G03B2752
摘要:
An optical arrangement, in particular a microlithographic projection printing installation, has in particular a slot-shaped image field or rotationally non-symmetrical illumination. An optical element (5) is therefore acted upon in a rotationally non-symmetrical manner by the radiation of a light source. To temper the optical element (5), a supply apparatus (11, 19 to 23) for gas is used. The latter having at least one supply line (21) and at least one gas directing device (11). The latter is aligned relative to the optical element (5) and controllable in such a way that the gas is directed by the gas directing device (11) towards the optical element (5). The volumetric flow of the exiting gas therefore has a magnitude and spatial distribution (17), which are adapted to the intensity distribution (6) of the radiation. By virtue of such tempering, rotationally non-symmetrical light-induced image defects in the optical element (5) are avoided or compensated.
公开/授权文献
- US20010006412A1 Optical arrangement 公开/授权日:2001-07-05
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