发明授权
- 专利标题： Exposure apparatus and illumination apparatus
- 专利标题（中）： 曝光装置和照明装置
-
申请号： US10223622申请日： 2002-08-20
-
公开(公告)号： US06781672B2公开(公告)日： 2004-08-24
- 发明人: Kiyoshi Motegi
- 申请人： Kiyoshi Motegi
- 优先权： JP11-059988 19990308
- 主分类号： G03B2772
- IPC分类号： G03B2772
摘要：
An exposure apparatus, wherein light emitted from a relatively low output light source is selectively transmitted by a light path switching controller and mirrors to exposure units, amplifiers are provided near the exposure units, and the light from the light source is amplified there and then sent to the corresponding exposure units.
公开/授权文献
- US20030002024A1 Exposure apparatus and illumination apparatus 公开/授权日：2003-01-02
信息查询
