A process for producing a purified aqueous hydrogen peroxide solution, comprising passing a charged aqueous hydrogen peroxide solution containing impurities through a purifier tower packed with an ion exchange resin, a chelate resin or an adsorption resin to thereby purify the charged aqueous hydrogen peroxide solution, wherein there are provided a feed pump of given output capable of causing the charged aqueous hydrogen peroxide solution to flow to the purifier tower and further a flow sensor capable of sensing a flow rate of charged aqueous hydrogen peroxide solution being fed to the purifier tower and wherein the output of the feed pump is controlled in cooperation with the flow sensor so as to bring the charged aqueous hydrogen peroxide solution into contact with the ion exchange resin, chelate resin or adsorption resin while maintaining the flow of charged aqueous hydrogen peroxide solution at a constant rate. In this process, not only can remaining of bubbles in the purifier tower be avoided but also pressure and temperature increases can be prevented in the purification operation, so that the aqueous hydrogen peroxide solution can be brought into contact with the ion exchange resin, etc. safely and efficiently.