发明授权
- 专利标题: Transistor formation for semiconductor devices
- 专利标题(中): 半导体器件的晶体管形成
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申请号: US10162289申请日: 2002-06-03
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公开(公告)号: US06784062B2公开(公告)日: 2004-08-31
- 发明人: Chih-Chen Cho , Zhongze Wang
- 申请人: Chih-Chen Cho , Zhongze Wang
- 主分类号: H01L218238
- IPC分类号: H01L218238
摘要:
A semiconductor fabrication method of forming a pair of transistor gates of opposite conductivity type by partially forming first and second gate stacks comprising an insulation layer, a conductive layer and polysilicon layer for the pair of transistor by removing a portion of the polysilicon layer. The polysilicon layer includes a dominant region of first-type conductive dopants and a dominant region of second-type conductive dopants. A first-type conductive transistor gate is formed by, completing the formation of the first gate stack and a second-type conductive transistor gate is formed by completing the formation of the second gate stack separately from the formation of the first-type transistor gate.
公开/授权文献
- US20030224574A1 Transistor formation for semiconductor devices 公开/授权日:2003-12-04
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