发明授权
- 专利标题: Vertical power component manufacturing method
- 专利标题(中): 垂直功率元件制造方法
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申请号: US10423359申请日: 2003-04-25
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公开(公告)号: US06784465B2公开(公告)日: 2004-08-31
- 发明人: Mathieu Roy
- 申请人: Mathieu Roy
- 优先权: FR9916487 19991224
- 主分类号: H01L2974
- IPC分类号: H01L2974
摘要:
A method for manufacturing a vertical power component on a substrate formed of a lightly-doped silicon wafer, including the steps of boring on the lower surface side of the substrate a succession of holes perpendicular to this surface; diffusing a dopant from the holes, of a second conductivity type opposite to that of the substrate; and boring similar holes on the upper surface side of the substrate to define an isolating wall and diffuse from these holes a dopant of the second conductivity type with a high doping level, the holes corresponding to the isolating wall being sufficiently close for the diffused areas to join laterally and vertically.
公开/授权文献
- US20030219964A1 Vertical power component manufacturing method 公开/授权日:2003-11-27
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