Invention Grant
- Patent Title: Vertical power component manufacturing method
- Patent Title (中): 垂直功率元件制造方法
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Application No.: US10423359Application Date: 2003-04-25
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Publication No.: US06784465B2Publication Date: 2004-08-31
- Inventor: Mathieu Roy
- Applicant: Mathieu Roy
- Priority: FR9916487 19991224
- Main IPC: H01L2974
- IPC: H01L2974

Abstract:
A method for manufacturing a vertical power component on a substrate formed of a lightly-doped silicon wafer, including the steps of boring on the lower surface side of the substrate a succession of holes perpendicular to this surface; diffusing a dopant from the holes, of a second conductivity type opposite to that of the substrate; and boring similar holes on the upper surface side of the substrate to define an isolating wall and diffuse from these holes a dopant of the second conductivity type with a high doping level, the holes corresponding to the isolating wall being sufficiently close for the diffused areas to join laterally and vertically.
Public/Granted literature
- US20030219964A1 Vertical power component manufacturing method Public/Granted day:2003-11-27
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