Invention Grant
US06784465B2 Vertical power component manufacturing method 有权
垂直功率元件制造方法

  • Patent Title: Vertical power component manufacturing method
  • Patent Title (中): 垂直功率元件制造方法
  • Application No.: US10423359
    Application Date: 2003-04-25
  • Publication No.: US06784465B2
    Publication Date: 2004-08-31
  • Inventor: Mathieu Roy
  • Applicant: Mathieu Roy
  • Priority: FR9916487 19991224
  • Main IPC: H01L2974
  • IPC: H01L2974
Vertical power component manufacturing method
Abstract:
A method for manufacturing a vertical power component on a substrate formed of a lightly-doped silicon wafer, including the steps of boring on the lower surface side of the substrate a succession of holes perpendicular to this surface; diffusing a dopant from the holes, of a second conductivity type opposite to that of the substrate; and boring similar holes on the upper surface side of the substrate to define an isolating wall and diffuse from these holes a dopant of the second conductivity type with a high doping level, the holes corresponding to the isolating wall being sufficiently close for the diffused areas to join laterally and vertically.
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