发明授权
- 专利标题: Semiconductor nonvolatile storage element and method of fabricating the same
- 专利标题(中): 半导体非易失性存储元件及其制造方法
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申请号: US10090851申请日: 2002-03-04
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公开(公告)号: US06784473B2公开(公告)日: 2004-08-31
- 发明人: Shigeki Sakai , Kazuo Sakamaki
- 申请人: Shigeki Sakai , Kazuo Sakamaki
- 优先权: JP2001-090509 20010327
- 主分类号: H01L2976
- IPC分类号: H01L2976
摘要:
To provide a semiconductor nonvolatile storage device capable of applying distributed voltage efficiently to a ferroelectric capacitor in a semiconductor nonvolatile storage device having an MFMIS structure without enlarging a memory cell area and a method of fabricating the same, a ferroelectric nonvolatile storage element is constructed by a structure successively laminated with a first insulator layer (3), a first conductor layer (4), a ferroelectric layer (5) and a second conductor layer (6) on a channel region and is constructed by a structure having a third conductor (9) and a fourth conductor (10) respectively laminated on a source region and a drain region, in which the third conductor (9) and the fourth conductor (10) are opposed to each other via the first conductor layer (4) and a second insulator thin film (11).
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