发明授权
US06784473B2 Semiconductor nonvolatile storage element and method of fabricating the same 有权
半导体非易失性存储元件及其制造方法

  • 专利标题: Semiconductor nonvolatile storage element and method of fabricating the same
  • 专利标题(中): 半导体非易失性存储元件及其制造方法
  • 申请号: US10090851
    申请日: 2002-03-04
  • 公开(公告)号: US06784473B2
    公开(公告)日: 2004-08-31
  • 发明人: Shigeki SakaiKazuo Sakamaki
  • 申请人: Shigeki SakaiKazuo Sakamaki
  • 优先权: JP2001-090509 20010327
  • 主分类号: H01L2976
  • IPC分类号: H01L2976
Semiconductor nonvolatile storage element and method of fabricating the same
摘要:
To provide a semiconductor nonvolatile storage device capable of applying distributed voltage efficiently to a ferroelectric capacitor in a semiconductor nonvolatile storage device having an MFMIS structure without enlarging a memory cell area and a method of fabricating the same, a ferroelectric nonvolatile storage element is constructed by a structure successively laminated with a first insulator layer (3), a first conductor layer (4), a ferroelectric layer (5) and a second conductor layer (6) on a channel region and is constructed by a structure having a third conductor (9) and a fourth conductor (10) respectively laminated on a source region and a drain region, in which the third conductor (9) and the fourth conductor (10) are opposed to each other via the first conductor layer (4) and a second insulator thin film (11).
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