发明授权
- 专利标题: Apparatus and method for manufacturing organic EL display device
- 专利标题(中): 用于制造有机EL显示装置的装置和方法
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申请号: US09809244申请日: 2001-03-16
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公开(公告)号: US06786789B2公开(公告)日: 2004-09-07
- 发明人: Toshio Sakai , Mitsuru Eida , Hiroshi Tokailin
- 申请人: Toshio Sakai , Mitsuru Eida , Hiroshi Tokailin
- 优先权: JP2000-080798 20000322
- 主分类号: H01J926
- IPC分类号: H01J926
摘要:
Provided are a producing apparatus and a producing process which make it possible to obtain effectively an organic EL display device capable of suppressing the generation of dark spots for a long time even in a high temperature environment. Therefore, an apparatus for producing an organic EL display device comprises a first unit for carrying a supporting substrate in, a second unit for heating at least the supporting substrate before forming an organic luminescence medium, thereby performing a dehydration treatment, a third unit for forming the organic luminescence medium and an upper element, and a fourth unit for sealing the periphery of the apparatus with a sealing member, wherein the first unit is arranged between the second unit and the third unit, a first carrying device is set up in the first unit, and a second carrying device is arranged between the third unit and the fourth unit.
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