Invention Grant
US06787281B2 Selected acid generating agents and their use in processes for imaging radiation-sensitive elements 失效
选择的酸产生剂及其在辐射敏感元件成像过程中的应用

  • Patent Title: Selected acid generating agents and their use in processes for imaging radiation-sensitive elements
  • Patent Title (中): 选择的酸产生剂及其在辐射敏感元件成像过程中的应用
  • Application No.: US10155696
    Application Date: 2002-05-24
  • Publication No.: US06787281B2
    Publication Date: 2004-09-07
  • Inventor: Ting TaoJianbing Huang
  • Applicant: Ting TaoJianbing Huang
  • Main IPC: G03F7021
  • IPC: G03F7021
Selected acid generating agents and their use in processes for imaging radiation-sensitive elements
Abstract:
An acid generating agent useful for imaging photosensitive elements selected from compounds of formulae (I), (II) and (III). wherein R1 is selected from the group consisting of an unsubstituted and substituted hydrocarbon or aryl group; wherein X is selected from the group consisting of oxygen, sulfur and selenium; wherein Y is selected from the group consisting of sulfur, selenium and tellurium; wherein Ar1 is selected from the group consisting of an unsubstituted and substituted aryl group; wherein R2, R3 and R4 are individually selected from the group consisting of an unsubstituted and substituted hydrocarbon or aryl group or any two of them are bonded together to form a ring structure; and wherein R5 and R6 are individually selected from the group of an unsubstituted and substituted hydrocarbon or aryl group, or are bonded to each other to form a ring structure.
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