Invention Grant
- Patent Title: Electrode insulator materials for use in extreme ultraviolet electric discharge sources
- Patent Title (中): 用于极紫外放电源的电极绝缘体材料
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Application No.: US10349740Application Date: 2003-01-21
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Publication No.: US06787788B2Publication Date: 2004-09-07
- Inventor: Melissa Shell , Bryan J. Rice
- Applicant: Melissa Shell , Bryan J. Rice
- Main IPC: H01J3520
- IPC: H01J3520
Abstract:
An insulator may be operable to electrically insulate a cathode from an anode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The insulator may be made of an aluminosilicate or a SiN/SiC material. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.
Public/Granted literature
- US20040140439A1 ELECTRODE INSULATOR MATERIALS FOR USE IN EXTREME ULTRAVIOLET ELECTRIC DISCHARGE SOURCES Public/Granted day:2004-07-22
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