发明授权
- 专利标题： Tuning of packaged film bulk acoustic resonator filters
- 专利标题（中）： 封装薄膜体声波谐振滤波器的调谐
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申请号： US10353276申请日： 2003-01-29
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公开(公告)号： US06787970B2公开(公告)日： 2004-09-07
- 发明人: Dong S. Shim , Jose Maiz , Li-Peng Wang , Qing Ma , Valluri Rao
- 申请人： Dong S. Shim , Jose Maiz , Li-Peng Wang , Qing Ma , Valluri Rao
- 主分类号： H01L4104
- IPC分类号： H01L4104
摘要：
Packaged film bulk acoustic resonators may be tuned after packaging by exposing them to irradiation. In one embodiment, transparent covers may be provided so that the film bulk acoustic resonator filter may be exposed to laser irradiation to either add or remove material from the filter and to thereby adjust its frequency.
公开/授权文献
- US20040145272A1 Tuning of packaged film bulk acoustic resonator filters 公开/授权日：2004-07-29
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