- Patent Title: Semiconductor processing methods of removing conductive material
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Application No.: US10600907Application Date: 2003-06-20
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Publication No.: US06790130B2Publication Date: 2004-09-14
- Inventor: Trung Tri Doan , Scott G. Meikle
- Applicant: Trung Tri Doan , Scott G. Meikle
- Main IPC: B24B100
- IPC: B24B100

Abstract:
The invention includes a semiconductive processing method of electrochemical-mechanical removing at least some of a conductive material from over a surface of a semiconductor substrate. A cathode is provided at a first location of the wafer, and an anode is provided at a second location of the wafer. The conductive material is polished with the polishing pad polishing surface. The polishing occurs at a region of the conductive material and not at another region. The region where the polishing occurs is defined as a polishing operation location. The polishing operation location is displaced across the surface of the substrate from said second location of the substrate toward said first location of the substrate. The polishing operation location is not displaced from said first location toward said second location when the polishing operation location is between the first and second locations. The invention also includes a semiconductor processing method of removing at least some of a conductive material from over a surface of a semiconductive material wafer. A polishing pad is displaced across an upper surface of the wafer from a central region of the wafer toward a periphery of the wafer, and is not displaced from the periphery to the central region.
Public/Granted literature
- US20040087251A1 Semiconductor processing methods of removing conductive material Public/Granted day:2004-05-06
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