发明授权
- 专利标题: Resist compositions and patterning process
- 专利标题(中): 抗蚀剂组合物和图案化工艺
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申请号: US09947504申请日: 2001-09-07
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公开(公告)号: US06790586B2公开(公告)日: 2004-09-14
- 发明人: Jun Hatakeyama , Yuji Harada , Jun Watanabe , Yoshio Kawai , Masaru Sasago , Masayuki Endo , Shinji Kishimura , Michitaka Ootani , Satoru Miyazawa , Kentaro Tsutsumi , Kazuhiko Maeda
- 申请人: Jun Hatakeyama , Yuji Harada , Jun Watanabe , Yoshio Kawai , Masaru Sasago , Masayuki Endo , Shinji Kishimura , Michitaka Ootani , Satoru Miyazawa , Kentaro Tsutsumi , Kazuhiko Maeda
- 优先权: JP2000-271202 20000907
- 主分类号: G03F7038
- IPC分类号: G03F7038
摘要:
A resist composition comprising (A) a polymer comprising recurring units having an alicyclic hydrocarbon backbone to which a carboxylate moiety capable of generating carboxylic acid when decomposed under acidic conditions is attached through a C1-C20 alkylene spacer, (B) a photoacid generator, and (C) an organic solvent is sensitive to high-energy radiation, and has excellent sensitivity and resolution at a wavelength below 180 nm, and good plasma etching resistance. Because these features of the inventive resist composition enable its use particularly as a resist at the exposure wavelength of a F2 excimer laser, a finely defined pattern can easily be formed, making the resist ideal as a micropatterning material in VLSI fabrication.
公开/授权文献
- US20020051935A1 Resist compositions and patterning process 公开/授权日:2002-05-02