发明授权
- 专利标题: Method for producing high-purity hydrochloric acid
- 专利标题(中): 生产高纯度盐酸的方法
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申请号: US10110064申请日: 2002-04-08
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公开(公告)号: US06793905B1公开(公告)日: 2004-09-21
- 发明人: Werner Büttner , Martin Hostalek , Ching-Jung Kan , Chih-Peng Lu
- 申请人: Werner Büttner , Martin Hostalek , Ching-Jung Kan , Chih-Peng Lu
- 优先权: DE19948206 19991007
- 主分类号: C01B707
- IPC分类号: C01B707
摘要:
This invention relates to a novel method, which can be carried out according to industrial standards, for producing high-purity hydrochloric acid with a very low particle content, for use in the production of semiconductors.