发明授权
US06795169B2 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 失效
曝光装置,光学投影装置和调整光学投影装置的方法

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
摘要:
An exposure apparatus having a plurality of projection optical systems where each of the projection optical systems projects a predetermined pattern onto a substrate and forms an exposure field on the substrate. The exposure apparatus also includes a substrate stage which holds the substrate and which moves in at least a scanning direction extending in a straight line. The plurality of exposure fields are arranged along a direction crossing the scanning direction, and the projection optical systems and the substrate relatively move during a pattern projecting operation along the scanning direction.
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