发明授权
- 专利标题: Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
- 专利标题(中): 曝光装置,光学投影装置和调整光学投影装置的方法
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申请号: US10382874申请日: 2003-03-07
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公开(公告)号: US06795169B2公开(公告)日: 2004-09-21
- 发明人: Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
- 申请人: Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
- 优先权: JP5/161588 19930630; JP5/345619 19931222; JP6/116800 19940530; JP6/123762 19940606; JP6/141326 19940623; JP6/177898 19940729; JP6/200494 19940825
- 主分类号: G03B2742
- IPC分类号: G03B2742
摘要:
An exposure apparatus having a plurality of projection optical systems where each of the projection optical systems projects a predetermined pattern onto a substrate and forms an exposure field on the substrate. The exposure apparatus also includes a substrate stage which holds the substrate and which moves in at least a scanning direction extending in a straight line. The plurality of exposure fields are arranged along a direction crossing the scanning direction, and the projection optical systems and the substrate relatively move during a pattern projecting operation along the scanning direction.
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