Invention Grant
- Patent Title: Wear ring assembly
- Patent Title (中): 磨环组装
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Application No.: US10293875Application Date: 2002-11-13
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Publication No.: US06796887B2Publication Date: 2004-09-28
- Inventor: David Marquardt
- Applicant: David Marquardt
- Main IPC: B24B100
- IPC: B24B100

Abstract:
A wear ring assembly is provided for use in a workpiece (e.g. a semiconductor wafer) polishing apparatus. The wear ring assembly comprises a wear element and a backing ring. The backing ring includes a fulcrum and is configured to transfer a component of pressure applied to the backing ring to the wear element via the fulcrum. In this manner, a substantially uniform vertical displacement of the wear ring is achieved.
Public/Granted literature
- US20040092217A1 WEAR RING ASSEMBLY Public/Granted day:2004-05-13
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