Invention Grant
US06796887B2 Wear ring assembly 失效
磨环组装

  • Patent Title: Wear ring assembly
  • Patent Title (中): 磨环组装
  • Application No.: US10293875
    Application Date: 2002-11-13
  • Publication No.: US06796887B2
    Publication Date: 2004-09-28
  • Inventor: David Marquardt
  • Applicant: David Marquardt
  • Main IPC: B24B100
  • IPC: B24B100
Wear ring assembly
Abstract:
A wear ring assembly is provided for use in a workpiece (e.g. a semiconductor wafer) polishing apparatus. The wear ring assembly comprises a wear element and a backing ring. The backing ring includes a fulcrum and is configured to transfer a component of pressure applied to the backing ring to the wear element via the fulcrum. In this manner, a substantially uniform vertical displacement of the wear ring is achieved.
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