发明授权
- 专利标题: Method and apparatus for producing silicon carbide single crystal
- 专利标题(中): 生产碳化硅单晶的方法和装置
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申请号: US10310913申请日: 2002-12-06
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公开(公告)号: US06797060B2公开(公告)日: 2004-09-28
- 发明人: Masashi Shigeto , Kotaro Yano , Nobuyuki Nagato
- 申请人: Masashi Shigeto , Kotaro Yano , Nobuyuki Nagato
- 优先权: JP11-370460 19991227
- 主分类号: C30B3500
- IPC分类号: C30B3500
摘要:
Silicon carbide single crystal is produced by allowing a silicon raw material to continuously react with a carbon raw material to generate gas, which reaches a seed crystal substrate on which a silicon carbide single crystal grows. Preferably, the silicon raw material is continuously fed onto the carbon raw material placed in a reaction crucible, and the carbon raw material is maintained at a temperature such that carbon is allowed to react with silicon in a molten state or a gaseous state to generate the reaction gas. An apparatus used for producing the silicon carbide single crystal comprises a reaction crucible, and a seed crystal substrate disposed in the reaction crucible; and further comprises means for maintaining the carbon raw material placed in the reaction crucible at a temperature such that carbon is allowed to react with silicon in a molten state or a gaseous state to generate the reaction gas, and means for continuously feeding the silicon raw material onto the carbon raw material placed in the reaction crucible.
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