发明授权
- 专利标题： Film forming unit
- 专利标题（中）： 成膜单元
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申请号： US10049283申请日： 2002-02-11
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公开(公告)号： US06797068B1公开(公告)日： 2004-09-28
- 发明人: Hideaki Yamasaki , Takashi Mochizuki , Susumu Arima , Yumiko Kawano
- 申请人： Hideaki Yamasaki , Takashi Mochizuki , Susumu Arima , Yumiko Kawano
- 优先权： JP11/228047 19990811
- 主分类号： C23C1600
- IPC分类号： C23C1600
摘要：
A film-forming unit of the invention includes a processing container in which a vacuum can be created, a stage arranged in the processing container, on which an object to be processed is placed, a process-gas supplying means for supplying a process gas into the processing container, and a heating means for heating the object to be processed placed on the stage. A division wall surrounds a lateral side and a lower side of the stage. An inert gas is introduced into a stage-side region surrounded by the division wall, by an inert-gas supplying means. A gap-forming member is arranged in such a manner that its inner peripheral portion is arranged above a peripheral portion of the object to be processed placed on the stage via a gap and its outer peripheral portion is arranged above the division wall via a gap.