发明授权
- 专利标题: Micro electromechanical switches
- 专利标题(中): 微机电开关
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申请号: US10112035申请日: 2002-04-01
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公开(公告)号: US06798321B2公开(公告)日: 2004-09-28
- 发明人: Paul Hallbjorner
- 申请人: Paul Hallbjorner
- 优先权: SE0101183 20010402
- 主分类号: H01H5122
- IPC分类号: H01H5122
摘要:
A micro electromechanical switch structure includes a beam that is continuously controllable by adding an actuation electrode proximate to, but outside a beam projection. The beam projection is onto and perpendicular to a plane of the actuation electrode. By placing an actuation electrode beside a beam instead of underneath the beam, the actuation electrode can continuously control the movement of the beam from a rest position to a complete actuation.
公开/授权文献
- US20030006125A1 Micro electromechanical switches 公开/授权日:2003-01-09
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