发明授权
US06798321B2 Micro electromechanical switches 有权
微机电开关

  • 专利标题: Micro electromechanical switches
  • 专利标题(中): 微机电开关
  • 申请号: US10112035
    申请日: 2002-04-01
  • 公开(公告)号: US06798321B2
    公开(公告)日: 2004-09-28
  • 发明人: Paul Hallbjorner
  • 申请人: Paul Hallbjorner
  • 优先权: SE0101183 20010402
  • 主分类号: H01H5122
  • IPC分类号: H01H5122
Micro electromechanical switches
摘要:
A micro electromechanical switch structure includes a beam that is continuously controllable by adding an actuation electrode proximate to, but outside a beam projection. The beam projection is onto and perpendicular to a plane of the actuation electrode. By placing an actuation electrode beside a beam instead of underneath the beam, the actuation electrode can continuously control the movement of the beam from a rest position to a complete actuation.
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