发明授权
US06799940B2 Removable semiconductor wafer susceptor 失效
可移动半导体晶圆基座

  • 专利标题: Removable semiconductor wafer susceptor
  • 专利标题(中): 可移动半导体晶圆基座
  • 申请号: US10310141
    申请日: 2002-12-05
  • 公开(公告)号: US06799940B2
    公开(公告)日: 2004-10-05
  • 发明人: Raymond JoeAnthony Dip
  • 申请人: Raymond JoeAnthony Dip
  • 主分类号: B65G4907
  • IPC分类号: B65G4907
Removable semiconductor wafer susceptor
摘要:
A removable semiconductor wafer susceptor used for supporting a substrate during batch processing. The susceptor includes a flat circular central plane with a predetermined outer diameter. The susceptor is sized to fit within an inner diameter formed from wafer support ledges of a wafer transport container. The susceptor includes edges that are chamfered and rounded to lessen stress concentration at the edges. The susceptor is transported through processing by a sieving action of transport automation.
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