发明授权
- 专利标题: Latching apparatus for a MEMS optical switch
- 专利标题(中): 用于MEMS光开关的锁存装置
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申请号: US09860300申请日: 2001-05-18
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公开(公告)号: US06801682B2公开(公告)日: 2004-10-05
- 发明人: Nan Zhang , Hong Zhang , Gary Nault
- 申请人: Nan Zhang , Hong Zhang , Gary Nault
- 主分类号: G02B642
- IPC分类号: G02B642
摘要:
A MEMS-based latching device is described. In accordance with one embodiment, a micro electromechanical system is formed on a substrate. The system includes a positionable member capable of being moved between at least two positions relative to the substrate. An actuator such as a comb drive actuator is provided which may include a stationary comb mounted on the substrate, a moveable comb interleaved with the stationary comb, and a beam connected between the substrate and the moveable comb. The comb drive actuator is coupled to a latching member so that the latching member can be moved between a first position and a second position. In the first position, the latching member engages the positionable member to prevent the positionable member from moving. In the second position, the latching member is disengaged from the positionable member to allow movement of the positionable member. The combs of the comb drive actuator deflect the beam to move the latching member from the first to the second position.
公开/授权文献
- US20020172452A1 Latching apparatus for a mems optical switch 公开/授权日:2002-11-21