发明授权
- 专利标题： Method and apparatus for incorporating control simulation environment
- 专利标题（中）： 结合控制仿真环境的方法和装置
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申请号： US09838498申请日： 2001-04-19
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公开(公告)号： US06802045B1公开(公告)日： 2004-10-05
- 发明人: Thomas J. Sonderman , Anthony J. Toprac , Anastasia Oshelski Peterson
- 申请人： Thomas J. Sonderman , Anthony J. Toprac , Anastasia Oshelski Peterson
- 主分类号： G06F1750
- IPC分类号： G06F1750
摘要：
The present invention provides for a method and an apparatus for implementing a control simulation environment into a manufacturing environment. A process task is defined. A process simulation function is performed to produce simulation data corresponding to the process task. The simulation data is integrated with a process control environment for controlling a manufacturing process of a semiconductor device.