发明授权
- 专利标题: Strained channel finfet
- 专利标题(中): 应变通道finfet
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申请号: US10349042申请日: 2003-01-23
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公开(公告)号: US06803631B2公开(公告)日: 2004-10-12
- 发明人: Srikanteswara Dakshina-Murthy , Judy Xilin An , Zoran Krivokapic , Haihong Wang , Bin Yu
- 申请人: Srikanteswara Dakshina-Murthy , Judy Xilin An , Zoran Krivokapic , Haihong Wang , Bin Yu
- 主分类号: H01L2701
- IPC分类号: H01L2701
摘要:
A semiconductor structure includes a fin and a layer formed on the fin. The fin includes a first crystalline material having a rectangular cross section and a number of surfaces. The layer is formed on the surfaces and includes a second crystalline material. The first crystalline material has a different lattice constant than the second crystalline material to induce tensile strain within the first layer.
公开/授权文献
- US20040145019A1 STRAINED CHANNEL FINFET 公开/授权日:2004-07-29
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