发明授权
- 专利标题: Optical waveguides with embedded air-gap cladding layer and methods of fabrication thereof
- 专利标题(中): 具有嵌入式气隙包覆层的光波导及其制造方法
-
申请号: US10074067申请日: 2002-02-11
-
公开(公告)号: US06807352B2公开(公告)日: 2004-10-19
- 发明人: Tony Mule′ , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Paul Kohl
- 申请人: Tony Mule′ , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Paul Kohl
- 主分类号: G02B610
- IPC分类号: G02B610
摘要:
Waveguides having air-gap cladding layers and methods of fabricating waveguides having air-gap cladding layers are disclosed. A representative waveguide includes a waveguide core having an air-gap cladding layer engaging a portion of the waveguide core. In addition, a representative method of fabricating a waveguide having an air-gap cladding layer includes: providing a substrate having a lower cladding layer disposed on the substrate; disposing a waveguide core on a portion of the lower cladding layer; disposing a sacrificial layer onto at least one portion of the lower cladding layer and the waveguide core; disposing an overcoat layer onto the lower cladding layer and the sacrificial layer; and removing the sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and engaging a portion of the waveguide core.
公开/授权文献
信息查询