发明授权
- 专利标题: Method for forming bump, semiconductor device and method for making the same, circuit board, and electronic device
- 专利标题(中): 凸块形成方法,半导体装置及其制造方法,电路板和电子装置
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申请号: US09843924申请日: 2001-04-30
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公开(公告)号: US06809020B2公开(公告)日: 2004-10-26
- 发明人: Kazunori Sakurai , Tsutomu Ota , Fumiaki Matsushima , Akira Makabe
- 申请人: Kazunori Sakurai , Tsutomu Ota , Fumiaki Matsushima , Akira Makabe
- 优先权: JP2000-132172 20000501; JP2000-272595 20000908; JP2001-044824 20010221
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
The invention provides a method for readily forming a bump with a desired width, a semiconductor device and a method for making the same, a circuit board, and an electronic device. A method for forming a bump includes forming an opening in an insulating film which exposes at least a part of a pad, and forming the bump so as to be connected to the pad. A resist layer 20 defines a through hole which extends over at least a part of the pad in plan view. A metal layer is formed in the opening so as to connect to the exposed portion of the pad.
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