- 专利标题： Scanning unit and scanning microscope having the same
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申请号： US10616879申请日： 2003-07-10
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公开(公告)号： US06809306B2公开(公告)日： 2004-10-26
- 发明人: Toshio Ando , Akitoshi Toda
- 申请人： Toshio Ando , Akitoshi Toda
- 优先权： JP2000-071128 20000314; JP2001-034391 20010209
- 主分类号： G02B2740
- IPC分类号： G02B2740
摘要：
A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.
公开/授权文献
- US20040065819A1 Scanning unit and scanning microscope having the same 公开/授权日：2004-04-08
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