发明授权
- 专利标题: Probe card for testing an integrated circuit
- 专利标题(中): 用于测试集成电路的探针卡
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申请号: US10031823申请日: 2002-06-13
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公开(公告)号: US06809539B2公开(公告)日: 2004-10-26
- 发明人: Kouichi Wada , Takehisa Takoshima , Akira Shimokohbe , Seiichi Hata
- 申请人: Kouichi Wada , Takehisa Takoshima , Akira Shimokohbe , Seiichi Hata
- 优先权: JP2000-145975 20000518
- 主分类号: G01R3102
- IPC分类号: G01R3102
摘要:
A probe card transmits high frequency signals between an integrated circuit under test and a semiconductor-testing device. The probe card includes a substrate, a signal transmission path formed on the substrate, a contactor formed on an end portion of the signal transmission path on one side of the substrate, a grounding conductor grounded, and a hole. The contactor is made of a metallic glass material, which shows a nature of viscous fluidity in the supercooled liquid region. The contactor is separated from the substrate over the hole. The contactor elastically contacts a pad of the circuit under test.
公开/授权文献
- US20020163349A1 Probe card and method of producing the same 公开/授权日:2002-11-07
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