发明授权
US06812850B2 Measuring apparatus 失效
测量装置

Measuring apparatus
摘要:
The present invention has an object to provide a measuring apparatus which can surely prevent the collision of a moving member. A measuring apparatus 10 comprises a moving member 18 which is moved to obtain information about a workpiece and might collide with the object 12, a moving device 20 for moving the moving member 18, and a protector 50 for preventing the moving member 18 from colliding with the object 12, the protector 50 including a protector body 52 provided in the moving member 18, a sensor 54 protruded from the protector body 52 by a predetermined length to come in contact such that a distance between the object 12 and the protector body 52 has a predetermined value or less and deformed elastically by a contact with the object 12, a strain detector 56 for detecting an amount of an elastic deformation of the sensor 54, and a controller 22 for stopping the relative movement of the moving member 18 by the moving device 20 or setting the relative movement in a reverse direction when the amount of the elastic deformation detected by the strain detector 56 exceeds a predetermined amount.
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