发明授权
- 专利标题: Polishing composition and polishing method employing it
- 专利标题(中): 抛光组合物和抛光方法
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申请号: US10214176申请日: 2002-08-08
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公开(公告)号: US06814766B2公开(公告)日: 2004-11-09
- 发明人: Koji Ohno , Kenji Sakai , Katsuyoshi Ina
- 申请人: Koji Ohno , Kenji Sakai , Katsuyoshi Ina
- 优先权: JP2001-242235 20010809
- 主分类号: C09G102
- IPC分类号: C09G102
摘要:
A polishing composition for polishing a semiconductor device having at least a tungsten film and an insulating film, which comprises the following components (a) to (d): (a) silicon dioxide, (b) periodic acid, (c) at least one pH controlling agent selected from the group consisting of ammonia, potassium hydroxide, sodium hydroxide, ammonium periodate, potassium periodate and sodium periodate, and (d) water.
公开/授权文献
- US20030084815A1 Polishing composition and polishing method employing it 公开/授权日:2003-05-08
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