发明授权
US06814766B2 Polishing composition and polishing method employing it 有权
抛光组合物和抛光方法

  • 专利标题: Polishing composition and polishing method employing it
  • 专利标题(中): 抛光组合物和抛光方法
  • 申请号: US10214176
    申请日: 2002-08-08
  • 公开(公告)号: US06814766B2
    公开(公告)日: 2004-11-09
  • 发明人: Koji OhnoKenji SakaiKatsuyoshi Ina
  • 申请人: Koji OhnoKenji SakaiKatsuyoshi Ina
  • 优先权: JP2001-242235 20010809
  • 主分类号: C09G102
  • IPC分类号: C09G102
Polishing composition and polishing method employing it
摘要:
A polishing composition for polishing a semiconductor device having at least a tungsten film and an insulating film, which comprises the following components (a) to (d): (a) silicon dioxide, (b) periodic acid, (c) at least one pH controlling agent selected from the group consisting of ammonia, potassium hydroxide, sodium hydroxide, ammonium periodate, potassium periodate and sodium periodate, and (d) water.
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