发明授权
US06815358B2 Electron beam lithography method for plating sub-100 nm trenches
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电子束光刻法用于电镀100nm以下的沟槽
- 专利标题: Electron beam lithography method for plating sub-100 nm trenches
- 专利标题(中): 电子束光刻法用于电镀100nm以下的沟槽
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申请号: US10108309申请日: 2002-03-28
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公开(公告)号: US06815358B2公开(公告)日: 2004-11-09
- 发明人: Xiaomin Yang , Andrew Robert Eckert
- 申请人: Xiaomin Yang , Andrew Robert Eckert
- 主分类号: H01L21311
- IPC分类号: H01L21311
摘要:
A lithography method for plating sub-100 nm narrow trenches, including providing a thin undercoat dissolution layer intermediate a seed layer and a resist layer, wherein the undercoat dissolution layer is relatively completely cleared off the seed layer by the developer solution such that the sides of the narrow trench will be generally vertical, particularly at the base of the narrow trench, thus facilitating plating the narrow trench with a high magnetic moment material.
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