发明授权
- 专利标题: Semiconductor component with substrate injection protection structure
- 专利标题(中): 半导体元件具有基板注入保护结构
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申请号: US10417972申请日: 2003-04-15
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公开(公告)号: US06815780B1公开(公告)日: 2004-11-09
- 发明人: Vishnu Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose , Todd C. Roggenbauer
- 申请人: Vishnu Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose , Todd C. Roggenbauer
- 主分类号: H01L2976
- IPC分类号: H01L2976
摘要:
A semiconductor component includes a semiconductor substrate (210) having a first conductivity type, a semiconductor epitaxial layer (220) having the first conductivity type located over the semiconductor substrate, a first semiconductor device (110) and a second semiconductor device (130) located in the semiconductor epitaxial layer and including, respectively, a first semiconductor region (120) and a second semiconductor region (140), both having the second conductivity type, an ohmic contact region (150) in the semiconductor epitaxial layer having the first conductivity type and located between the first and second semiconductor devices, and at least one electrically insulating trench (160, 360) located in the semiconductor epitaxial layer and circumscribing at least the first semiconductor device. The semiconductor epitaxial layer has a doping concentration lower than a doping concentration of the semiconductor substrate.
公开/授权文献
- US20040207047A1 SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURING SAME 公开/授权日:2004-10-21