发明授权
- 专利标题: Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment
- 专利标题(中): 液晶显示制造设备湿法加工液和液体供应系统
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申请号: US10413557申请日: 2003-04-15
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公开(公告)号: US06817387B2公开(公告)日: 2004-11-16
- 发明人: Yong-Seok Park , Sang-Ho Kim , Sok-Joo Lee
- 申请人: Yong-Seok Park , Sang-Ho Kim , Sok-Joo Lee
- 优先权: KR10-2002-0022205 20020423; KR10-2002-0022700 20020425
- 主分类号: B65B120
- IPC分类号: B65B120
摘要:
A fluid supplying system for LCD manufacturing equipment and a wet processing bath therefor are provided. The fluid supplying system includes a bath united with storage tank in which a fluid collection bath is united with a fluid storage tank. The storage tank having a small size is individually provided to each bath. Further, the body of the wet processing bath is made of a durable material with a chemical resistive material coated thereon. Therefore, the wet processing unit can be widely used regardless of the different types of chemical fluid.
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