发明授权
US06817387B2 Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment 有权
液晶显示制造设备湿法加工液和液体供应系统

  • 专利标题: Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment
  • 专利标题(中): 液晶显示制造设备湿法加工液和液体供应系统
  • 申请号: US10413557
    申请日: 2003-04-15
  • 公开(公告)号: US06817387B2
    公开(公告)日: 2004-11-16
  • 发明人: Yong-Seok ParkSang-Ho KimSok-Joo Lee
  • 申请人: Yong-Seok ParkSang-Ho KimSok-Joo Lee
  • 优先权: KR10-2002-0022205 20020423; KR10-2002-0022700 20020425
  • 主分类号: B65B120
  • IPC分类号: B65B120
Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment
摘要:
A fluid supplying system for LCD manufacturing equipment and a wet processing bath therefor are provided. The fluid supplying system includes a bath united with storage tank in which a fluid collection bath is united with a fluid storage tank. The storage tank having a small size is individually provided to each bath. Further, the body of the wet processing bath is made of a durable material with a chemical resistive material coated thereon. Therefore, the wet processing unit can be widely used regardless of the different types of chemical fluid.
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