发明授权
- 专利标题： Micro mirror unit and method of making the same
- 专利标题（中）： 微镜单元及其制作方法
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申请号： US10327855申请日： 2002-12-26
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公开(公告)号： US06817725B2公开(公告)日： 2004-11-16
- 发明人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
- 申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
- 优先权： JP2002-170291 20020611
- 主分类号： G02B7182
- IPC分类号： G02B7182
摘要：
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
公开/授权文献
- US20030227700A1 Micro mirror unit and method of making the same 公开/授权日：2003-12-11
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