发明授权
US06818376B2 Cross-linker monomer comprising double bond and photoresist copolymer containing the same
有权
包含双键的交联剂单体和含有它们的光致抗蚀剂共聚物
- 专利标题: Cross-linker monomer comprising double bond and photoresist copolymer containing the same
- 专利标题(中): 包含双键的交联剂单体和含有它们的光致抗蚀剂共聚物
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申请号: US10120197申请日: 2002-04-09
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公开(公告)号: US06818376B2公开(公告)日: 2004-11-16
- 发明人: Geun Su Lee , Jae Chang Jung , Ki Ho Baik
- 申请人: Geun Su Lee , Jae Chang Jung , Ki Ho Baik
- 优先权: KR99-35046 19990823
- 主分类号: G03F7004
- IPC分类号: G03F7004
摘要:
The present invention provides a cross-linker monomer of formula 1, a photoresist polymer derived from a monomer comprising the same, and a photoresist composition comprising the photoresist polymer. The cross-linking unit of the photoresist polymer can be hydrolyzed (or degraded or broken) by an acid generated from a photoacid generator on the exposed region. It is believed that this acid degradation of the cross-linking unit increases the contrast ratio between the exposed region and the unexposed region. The photoresist composition of the present invention has improved pattern profile, enhanced adhesiveness, excellent resolution, sensitivity, durability and reproducibility. where A, B, R1, R2, R3, R4, R5, R6 and k are as defined herein.
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