发明授权
US06818861B2 Discharge electrode for a wire bonding apparatus 失效
用于引线接合装置的放电电极

  • 专利标题: Discharge electrode for a wire bonding apparatus
  • 专利标题(中): 用于引线接合装置的放电电极
  • 申请号: US10671089
    申请日: 2003-09-25
  • 公开(公告)号: US06818861B2
    公开(公告)日: 2004-11-16
  • 发明人: Toru Maeda
  • 申请人: Toru Maeda
  • 优先权: JP2002-282935 20020927
  • 主分类号: B23K3100
  • IPC分类号: B23K3100
Discharge electrode for a wire bonding apparatus
摘要:
A straight rod form discharge electrode used in a wire bonding apparatus. The electrode core material is covered, except for its tip end, by an alumina film that has been subjected to a pore sealing treatment. The alumina film subjected to the pore sealing treatment is formed by a two-stage process. In the first-stage, an alumina film having a porous structure is formed on the surface of the electrode core material for the thickness of approximately 6 &mgr;m by plasma flame coating method or anodic oxidation method; and in the second-stage, the porous structure is subjected to a pore sealing treatment in which an alumina film is caused to adhere to the porous structure by laser PVD or a pore sealing treatment is performed with a resin.
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