发明授权
- 专利标题: Non-volatile memory device and fabrication method thereof
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US10643335申请日: 2003-08-15
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公开(公告)号: US06818956B2公开(公告)日: 2004-11-16
- 发明人: Tung-Cheng Kuo , Chien-Hung Liu , Shyi-Shuh Pan , Shou-Wei Huang
- 申请人: Tung-Cheng Kuo , Chien-Hung Liu , Shyi-Shuh Pan , Shou-Wei Huang
- 优先权: TW91105279A 20020320
- 主分类号: H01L2362
- IPC分类号: H01L2362
摘要:
A nonvolatile read-only memory device, wherein a word line is on a substrate and the word line includes a metal layer and a polysilicon line. A trapping layer is further located between the word line and the substrate. A polysilicon protection line is formed over the substrate and the polysilicon protection line connects the word line and a grounded doped region in the substrate, wherein the resistance of the polysilicon protection line is higher than that of the word line.
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