发明授权
- 专利标题: Temperature sensor
- 专利标题(中): 温度感应器
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申请号: US10387016申请日: 2003-03-11
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公开(公告)号: US06819217B2公开(公告)日: 2004-11-16
- 发明人: Karl-Heinz Wienand , Thomas Loose
- 申请人: Karl-Heinz Wienand , Thomas Loose
- 优先权: DE10210772 20020312
- 主分类号: H01C304
- IPC分类号: H01C304
摘要:
A temperature sensor is provided with a temperature-sensitive element on a surface of a monocrystalline substrate, wherein the temperature-sensitive element is made of a platinum thin-film resistor and is produced as an epitaxial layer. The monocrystalline substrate can be an electrically insulating material, preferably &agr;-Al2O3 or MgO. Alternatively, the substrate may be an electrically conducting material, such as silicon, with an electrically insulating epitaxial layer arranged between the substrate and the platinum thin-film resistor. The platinum thin-film resistor epitaxial layer is preferably deposited by physical vapor deposition (PVD), chemical vapor deposition (CVD), or molecular beam epitaxy (MBE).
公开/授权文献
- US20030174041A1 Temperature sensor 公开/授权日:2003-09-18