发明授权
US06819822B2 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
有权
具有垂直静电梳状驱动器的二维万向扫描执行器用于致动和/或感测
- 专利标题: Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
- 专利标题(中): 具有垂直静电梳状驱动器的二维万向扫描执行器用于致动和/或感测
-
申请号: US09751660申请日: 2000-12-28
-
公开(公告)号: US06819822B2公开(公告)日: 2004-11-16
- 发明人: Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Satinderpall Pannu
- 申请人: Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Satinderpall Pannu
- 主分类号: G02B635
- IPC分类号: G02B635
摘要:
A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.
公开/授权文献
信息查询