Invention Grant
US06820493B1 Precision multi-dimensional capacitive transducer 失效
精密多维电容式换能器

  • Patent Title: Precision multi-dimensional capacitive transducer
  • Patent Title (中): 精密多维电容式换能器
  • Application No.: US09413494
    Application Date: 1999-10-06
  • Publication No.: US06820493B1
    Publication Date: 2004-11-23
  • Inventor: Wayne Bonin
  • Applicant: Wayne Bonin
  • Main IPC: G01L1904
  • IPC: G01L1904
Precision multi-dimensional capacitive transducer
Abstract:
A high precision force and displacement measuring device adapted to operate in at least two directions, including signal multiplexing scheme providing multiple signal channels to be transmitted through a single pickup electrode and sense amplifier, while maintaining high isolation between the channels, as well as identical electrical response characteristics of all channels. The device may be used in conjunction with a movable stage (such as on an optical microscope) to perform mechanical measurements on Micro Electro-Mechanical Systems (MEMS) devices.
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