Invention Grant
- Patent Title: Precision multi-dimensional capacitive transducer
- Patent Title (中): 精密多维电容式换能器
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Application No.: US09413494Application Date: 1999-10-06
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Publication No.: US06820493B1Publication Date: 2004-11-23
- Inventor: Wayne Bonin
- Applicant: Wayne Bonin
- Main IPC: G01L1904
- IPC: G01L1904

Abstract:
A high precision force and displacement measuring device adapted to operate in at least two directions, including signal multiplexing scheme providing multiple signal channels to be transmitted through a single pickup electrode and sense amplifier, while maintaining high isolation between the channels, as well as identical electrical response characteristics of all channels. The device may be used in conjunction with a movable stage (such as on an optical microscope) to perform mechanical measurements on Micro Electro-Mechanical Systems (MEMS) devices.
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