发明授权
US06821620B2 Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
有权
清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法
- 专利标题： Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
- 专利标题（中）： 清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法
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申请号： US10311065申请日： 2002-12-13
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公开(公告)号： US06821620B2公开(公告)日： 2004-11-23
- 发明人: Makoto Namikawa , Yoshio Terada , Eiji Toyoda
- 申请人： Makoto Namikawa , Yoshio Terada , Eiji Toyoda
- 优先权： JPP2000-230340 20000713; JPP2000-215233 20000714; JPP2000-349840 20001116; JPP2000-399103 20001227; JPP2001-004634 20010112
- 主分类号： B32B2730
- IPC分类号： B32B2730
摘要：
A cleaning sheet has a cleaning layer having a surface resistivity not less than 1×1013 &OHgr;/□. In a method of manufacturing a conveying member with a cleaning function, for sticking the cleaning sheet, in which the cleaning layer formed of an adhesive that is polymerized/cured by an active energy is provided onto one surface of a base material and an ordinary adhesive layer is provided onto the other surface thereof, onto the conveying member via an ordinary adhesive layer to have a shape larger than the shape of the conveying member and then cutting the cleaning sheet along a shape of the conveying member, wherein a polymerizing/curing reaction of the cleaning layer is carried out after the cleaning sheet is cut out into the shape of the conveying member.
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