- 专利标题: Nonvolatile memory structures and fabrication methods
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申请号: US09969841申请日: 2001-10-02
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公开(公告)号: US06821847B2公开(公告)日: 2004-11-23
- 发明人: Chung Wai Leung , Chia-Shun Hsiao , Vei-Han Chan
- 申请人: Chung Wai Leung , Chia-Shun Hsiao , Vei-Han Chan
- 主分类号: H01L218247
- IPC分类号: H01L218247
摘要:
To fabricate a semiconductor memory, one or more pairs of first structures are formed over a semiconductor substrate. Each first structure comprises (a) a plurality of floating gates of memory cells and (b) a first conductive line providing control gates for the memory cells. The control gates overlie the floating gates. Each pair of the first structures corresponds to a plurality of doped regions each of which provides a source/drain region to a memory cell having the floating and control gates in one or the structure and a source/drain region to a memory cell having floating and control gates in the other one of the structures. For each pair, a second conductive line is formed whose bottom surface extends between the two structures and physically contacts the corresponding first doped regions. In some embodiments, the first doped regions are separated by insulation trenches. The second conductive line may form a conductive plug at least partially filling the region between the two first structures.
公开/授权文献
- US20030068859A1 Nonvolatile memory structures and fabrication methods 公开/授权日:2003-04-10
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