- 专利标题: Multi-directional diffusion-symmetric slant reflector
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申请号: US10453084申请日: 2003-06-02
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公开(公告)号: US06825901B2公开(公告)日: 2004-11-30
- 发明人: Dai-Liang Ting , Wei-Chih Chang
- 申请人: Dai-Liang Ting , Wei-Chih Chang
- 主分类号: G02F11335
- IPC分类号: G02F11335
摘要:
A multi-directional diffusion-symmetric slant reflector. A substrate having a plurality of domains thereon is provided. A plurality of diffusion-symmetric slant reflectors are formed on the substrate. The diffusion-symmetric slant reflectors has a variety of shapes, including conical, elliptical cone longitudinal prismatic or other polyhedron shapes. A plurality of bumps, such as cone, elliptical cone or longitudinal prism structures, are formed on the slant surface of the diffusion-symmetric slant reflectors. The longitudinal prismatic and elliptical cone diffusion-symmetric slant reflectors within a domain are aligned to a direction. An reflection layer such as an aluminum layer, a silver layer or a layer made of materials with a characteristic of reflection, is formed over the surface of the diffusion-symmetric slant reflector. A method of forming a diffusion-symmetric slant reflector is also provided. A substrate is provided and then a photoresist layer is formed over the substrate. After the substrate and the photoresist layer assembly are baked, a photolithographic process is conducted using a gray-level mask, a multi-step exposure process or a half-tone mask. The exposed photoresist layer is developed, followed by an intermediate baking and a hard baking. In the final step, aluminum is deposited over the photoresist layer.
公开/授权文献
- US20030206258A1 Multi-directional diffusion-symmetric slant reflector 公开/授权日:2003-11-06
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