发明授权
- 专利标题: Laser oscillator
- 专利标题(中): 激光振荡器
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申请号: US10385529申请日: 2003-03-12
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公开(公告)号: US06826221B2公开(公告)日: 2004-11-30
- 发明人: Akira Egawa , Michinori Maeda , Kazuya Ohta , Akira Miyake
- 申请人: Akira Egawa , Michinori Maeda , Kazuya Ohta , Akira Miyake
- 优先权: JP2002-081757 20020322
- 主分类号: H01S322
- IPC分类号: H01S322
摘要:
A laser oscillator capable of effectively collecting and removing particulate foreign matter contained in gas laser medium flowing in a circulating path. An electric discharge section arranged in an optical resonator is incorporated into a circulating path of the gas medium including a heat exchanger and a blower. The gas laser medium flows at a high speed in the circulating path. At least one spiral-flow dust collecting mechanism is provided in the circular path downstream of the heat exchanger, and the gas laser medium discharged from the blower is supplied to the electric discharge section through the spiral-flow dust collecting mechanism. The gas laser medium containing the particulate foreign matter spirally flows around an inner pipe in a cylindrical body of the spiral-flow dust collecting mechanism. While spirally flowing in the cylindrical body, the foreign matter having a relative density larger than that of the gas medium is separated from the gas medium by centrifugal force, to introduced into a dust collecting section through a slit to be deposited. Pressure of the gas laser medium flowing in the circulating path may be adjusted in accordance with diameter and/or mass of the particulate foreign matter to be removed.
公开/授权文献
- US20030179797A1 Laser oscillator 公开/授权日:2003-09-25
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