发明授权
- 专利标题: Showerhead assembly for a processing chamber
- 专利标题(中): 用于处理室的喷头组件
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申请号: US10047076申请日: 2002-01-15
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公开(公告)号: US06827815B2公开(公告)日: 2004-12-07
- 发明人: Mark M. Hytros , Truc T. Tran , Hongbee Teoh , Lawrence Chung-Lai Lei , Avgerinos Gelatos , Salvador P. Umotoy
- 申请人: Mark M. Hytros , Truc T. Tran , Hongbee Teoh , Lawrence Chung-Lai Lei , Avgerinos Gelatos , Salvador P. Umotoy
- 主分类号: C23C1600
- IPC分类号: C23C1600
摘要:
A showerhead assembly for distributing gases within a processing chamber is provided. In one embodiment, the showerhead assembly includes a cylindrical member having a faceplate coupled thereto. The cylindrical member has an outwardly extending first flange at a first end. The faceplate is coupled to a second end of the cylindrical member and has a plurality of holes formed though a center region of the faceplate. The joint between the cylindrical member and the faceplate allow for relative movement when subjected to thermal stresses. In another embodiment, at least one clamp member retains the faceplate to the second end of the cylindrical member.
公开/授权文献
- US20030132319A1 Showerhead assembly for a processing chamber 公开/授权日:2003-07-17
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