A pressure sensitive adhesive sheet is described. In addition, a pressure sensitive adhesive sheet that includes a pressure sensitive adhesive sheet and a release sheet that is removably attached to the pressure sensitive adhesive sheet is described. The release sheet comprises a release sheet base and a releasing agent layer provided on the release sheet base. The releasing agent layer is substantially free of silicone compound. The base of the pressure sensitive adhesive sheet and the release sheet base are formed from a plastic film or a lint-free paper, and the count of generated particles having a diameter of 0.1 &mgr;m or more generated from the pressure sensitive adhesive sheet with the release sheet is equal to or less than 100 particles/liter when measured according to Test Method for the Measurement of Particle Generation from Sheet Materials determined by SEMI G67-0996.