发明授权
- 专利标题: Anthracene derivative and radiation-sensitive resin composition
- 专利标题(中): 蒽衍生物和辐射敏感性树脂组合物
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申请号: US10379507申请日: 2003-03-06
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公开(公告)号: US06830868B2公开(公告)日: 2004-12-14
- 发明人: Tomoki Nagai , Tsutomu Shimokawa
- 申请人: Tomoki Nagai , Tsutomu Shimokawa
- 优先权: JP2002-064549 20020308
- 主分类号: G03F7004
- IPC分类号: G03F7004
摘要:
A novel anthracene derivative useful as an additive to a radiation-sensitive resin composition is disclosed. The anthracene derivative has the following formula (1), wherein R1 groups individually represent a hydroxyl group or a monovalent organic group having 1-20 carbon atoms, n is an integer of 0-9, X is a single bond or a divalent organic group having 1-12 carbon atoms, and R2 represents a monovalent acid-dissociable group. The radiation-sensitive resin composition comprises the anthracene derivative of the formula (1), a resin insoluble or scarcely soluble in alkali, but becomes alkali soluble in the presence of an acid, and a photoacid generator. The composition is useful as a chemically-amplified resist for microfabrication utilizing deep ultraviolet rays, typified by a KrF excimer laser and ArF excimer laser.
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