发明授权
US06830941B1 Method and apparatus for identifying individual die during failure analysis
有权
在故障分析过程中识别各个模具的方法和装置
- 专利标题: Method and apparatus for identifying individual die during failure analysis
- 专利标题(中): 在故障分析过程中识别各个模具的方法和装置
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申请号: US10321000申请日: 2002-12-17
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公开(公告)号: US06830941B1公开(公告)日: 2004-12-14
- 发明人: Chern-Jiann Lee , Boon Y. Ang , David Lin , Mehrdad Mahanpour
- 申请人: Chern-Jiann Lee , Boon Y. Ang , David Lin , Mehrdad Mahanpour
- 主分类号: H01L2166
- IPC分类号: H01L2166
摘要:
A method and apparatus for identifying individual semiconductor die that originate from a semiconductor substrate containing a plurality of die is disclosed. Aspects of the invention include physically associating a respective die ID with at least a portion of individual die on the wafer, and storing the die ID and wafer fabrication information in a database. During subsequent testing of the die, the die ID is used to retrieve the wafer fabrication information from the database, thereby aiding a determination as to a cause of a failure of the die.
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