发明授权
US06833578B1 Method and structure improving isolation between memory cell passing gate and capacitor
有权
存储单元通过栅极和电容器之间的隔离方法和结构
- 专利标题: Method and structure improving isolation between memory cell passing gate and capacitor
- 专利标题(中): 存储单元通过栅极和电容器之间的隔离方法和结构
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申请号: US10733216申请日: 2003-12-11
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公开(公告)号: US06833578B1公开(公告)日: 2004-12-21
- 发明人: Kuo-Chi Tu , Chun-Yao Chen , Huey-Chi Chu , Chung-Wei Chang , Tien-Lu Lin , Kuo-Ching Huang , Wen-Cheng Chen , Tsung-Hsun Huang , Hsiao-Hui Tseng
- 申请人: Kuo-Chi Tu , Chun-Yao Chen , Huey-Chi Chu , Chung-Wei Chang , Tien-Lu Lin , Kuo-Ching Huang , Wen-Cheng Chen , Tsung-Hsun Huang , Hsiao-Hui Tseng
- 主分类号: H01L27108
- IPC分类号: H01L27108
摘要:
A memory cell comprising a capacitor having a dielectric layer interposing first and second vertically disposed electrodes, an insulating lining located over the capacitor, and a transistor gate extension passing over the capacitor. A spacer isolates an end of one of the capacitor electrodes from the transistor gate extension. In one embodiment, the spacer includes a first non-planar profile configured to engage a second non-planar profile comprising ends of the one of the capacitor electrodes and the insulating lining.
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